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Pneumatic Gate Valve

Pneumatic Gate Valve
** Application
- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
** Features
- Particle – Free
- Vibration – Free
- Pneumatic Actuator
- Position Indicator
- Fast valve welded bellows (AM350)
- Easy to service
** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Bellows Material (SS316L , Inconel )
Pneumatic Gate Valve_map
SIZE : ISO-40, 50, 63, 80, 100, 125, 160, 200, 250, 320, 350, 400, 450, 500
Dimensions Approximate
** Specifications
Pressure range 5 X 10-7mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.2 bar in either direction
Material Valve body, bonnet seal, blade AL6061
Welded bellows SS316L (option Inconel)
Valve actuator
AL6061, SS304
Seal Materials CHEMRAZ(option Kalrez)
Temperature Valve body 120°C (option 180°C)
Valve actuator 80°C
Operation Single acting
Cycle until first service ≥ 50,000
Position sensor (open/close) - Reed switch SMC(D-A93)
     
 
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