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RPS

Plasma is an ionized gas essential in many process of semiconductor such as photo-resist removal, wafer pre-clean and thin film nitridation and oxidation. Ak Tech provides repairing service of RF powered remote sources for generation of oxygen, nitrogen, hydrogen plasma
RPS
SERIES AX7650 AX7650 AX7650 AX7650
Max Flow Rate 2L(0.1~2sim NF3) 2L(0.1~2sim NF3) 2L(0.1~2sim NF3) 2L(0.1~2sim NF3)
Max Power(kw) 5KW 5KW 5KW 5KW
Inition Gas/Pressure Ar,1~4 Torr Ar,1~4 Torr Ar,1~4 Torr Ar,1~4 Torr
Operatmg Pressure 95~100% 95~100% 95~100% 95~100%
Dissoction Rate 208+/-10% 208+/-10% 208+/-10% 208+/-10%
Power Consumption VAC,3Ø50/60HZ 30AMP VAC,3Ø50/60HZ 30AMP VAC,3Ø50/60HZ 30AMP VAC,3Ø50/60HZ 30AMP
Weight 17.3Kg 21.4Kg 33.7Kg 20.4Kg/25.8Kg
Dimension(WxHxD) /inch 73*9.04*16.76 73*9.04*16.76 73*9.04*16.76 73*9.04*16.76
     
 
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