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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
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STANDARD
WITH HOUSING COVER
DOUBLE HOUSING
DUAL HOUSING
HEATED TYPE
DUAL SEAL TYPE
DOOR STANDARD
SOLAR, LCD, FPD
Rectangular Gate Valve_DOOR STANDARD
Rectangular Gate Valve_DOOR STANDARD
** Application
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/flat panel processing
- All other cluster vacuum systems
** Features
- Semi standard application (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
- Particle and vibration free
- Realization of exact L-motion
- Easy maintenance
** Options
- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Double gate seal door valve available
Rectangular Gate Valve_DOOR STANDARD_map
SIZE : 32X222 , 46X236 , 50X336, ETC Dimensions Approximate
** Specifications
Pressure range 1 X 10-9mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.0 bar in either direction
Material Valve body, bonnet seal, blade AL6061
Welded bellows  
Valve actuator
SS304, AL6061
Seal Materials VITON(option KALREZ, CHEMRAZ)
Temperature Valve body 100°C
Valve actuator 60°C
Operation Double acting
Cycle until first service ≥ 3 million
Position sensor (open/close) - Reed switch SMC(D-A93)
     
 
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Auto Gate Valve
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