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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
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STANDARD
WITH HOUSING COVER
DOUBLE HOUSING
DUAL HOUSING
HEATED TYPE
DUAL SEAL TYPE
DOOR STANDARD
SOLAR, LCD, FPD
Rectangular Gate Valve_SOLAR, LCD, FPD
Rectangular Gate Valve_SOLAR, LCD, FPD
** Application
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
** Features
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Double pneumatic actuator
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
** Options
- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
Rectangular Gate Valve_SOLAR, LCD, FPD_map
SIZE : 32X222 , 46X236 , 50X336, ETC Dimensions Approximate
** Specifications
Pressure range 1 X 10-9mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.2 bar in either direction
Material Valve body, bonnet seal, blade AL6061
Welded bellows AL6061
Valve actuator
SS304, AL6061
Seal Materials VITON (option KALREZ, ETC)
Temperature Valve body 120°C
Valve actuator 80°C
Operation Double acting
Cycle until first service ≥ 1 million
Position sensor (open/close) - Reed switch FESTO : SME-8M-DS-24V-K-2.5-OE
     
 
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Auto Gate Valve
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