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Remote Plasma Control Valve

Remote Plasma Control Valve
** Application
- High vacuum process
- All CVD process (including MO, PE,HDP, LP and AP)
- Photovoltaic and semiconductor application
** Features
- Pneumatic actuation
- Rated for 1 million cycles
- Double o-ring seal
- Easy maintenance
** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
Remote Plasma Control Valve_map
SIZE : ISO-25, 40, 50
Dimensions Approximate
** Specifications
Pressure range 1 X 10-8mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.5 bar in either direction
Material Valve body, bonnet seal, blade AL6061
Welded bellows  
Valve actuator
AL6061
Seal Materials CHEMRAZ
Temperature Valve body 150°C
Valve actuator 100°C
Operation Double acting
Cycle until first service ≥ 1 million
Position sensor (open/close) - Reed switch Honeywell (11SM-244-T, JS-5)
     
 
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