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ESC(Electrostatic Chuck)
 
bullet ESC(Electrostatic Chuck)
HOME > products> ESC(Electrostatic Chuck)
 
200mm Inova 2 Gap Std ESC
200mm-2 Gap Std ESC
OEM NOVELLUS
OEM P/N 15-269720-00
15-148764-00
APPLICABLE TOOL INOVA
AK P/N J082237-2
 
300mm Inova 2 Gap Hi-Temp Pink ESC
300mm-2 Gap Hi-Temp Pink ESC
OEM NOVELLUS
OEM P/N 15-270165-00
APPLICABLE TOOL INOVA NeXT (INOVAxT)
AK P/N J082038-2
 
300mm Inova Low E/D Pedestal
OVER ETCH STATION BELLOWS
OEM NOVELLUS
OEM P/N 02-165193-00
APPLICABLE TOOL INOVA NeXT (INOVAxT)
AK P/N R.B300.C (New ESC)
R.B300.B (Reworked ESC)
 
300mm Inova Hi E/D Pedestal
OVER ETCH STATION BELLOWS
OEM NOVELLUS
OEM P/N 02-311900-01
APPLICABLE TOOL INOVA NeXT (INOVAxT)
AK P/N R.B300.C (New ESC)
R.B300.B (Reworked ESC)
 
300mm Inova Hi E/D Pedestal
OVER ETCH STATION BELLOWS
OEM NOVELLUS
OEM P/N 02-239830-01
APPLICABLE TOOL INOVA NeXT (INOVAxT)
AK P/N R.B300.C (New ESC)
R.B300.B (Reworked ESC)
 
300mm Inova PMAG Pedestal
OVER ETCH STATION BELLOWS
OEM NOVELLUS
OEM P/N 02-314135-01
02-314135-13
APPLICABLE TOOL INOVA NeXT (INOVAxT)
AK P/N R.B300.C (New ESC)
R.B300.B (Reworked ESC)
 
300mm Inova TD4 Pedestal
OVER ETCH STATION BELLOWS
OEM NOVELLUS
OEM P/N 02-371240-01
02-371240-13
APPLICABLE TOOL INOVA NeXT (INOVAxT)
AK P/N R.B300.C (New ESC) R.B300.B (Reworked ESC)
 
300mm Inova CIP1 Pedestal (RF Controlled)
OVER ETCH STATION BELLOWS
OEM NOVELLUS
OEM P/N 02-412414-01
02-412414-13
APPLICABLE TOOL INOVA NeXT (INOVAxT)
AK P/N R.B300.C (New ESC) R.B300.B (Reworked ESC)
 
100 mm STS / SPTS ESC Double sided ,3 lift pins on Ø 30 PCD
ULTIMA LIFT BELLOWS
OEM STS / SPTS
OEM P/N 256326
APPLICABLE TOOL ASE / AOE Process Chamber (Advacned Silcion Etch / Advanced Oxide Etch)
AK P/N J082015-5
 
125 mm STS / SPTS ESC Double sided ,3 lift pins on Ø 30 PCD
ULTIMA LIFT BELLOWS
OEM STS / SPTS
OEM P/N 256327
APPLICABLE TOOL ASE / AOE Process Chamber (Advacned Silcion Etch / Advanced Oxide Etch)
AK P/N J082013-4
 
150 mm STS / SPTS ESC Double sided ,3 lift pins on Ø 30 PCD
ULTIMA LIFT BELLOWS
OEM STS / SPTS
OEM P/N 256328
APPLICABLE TOOL ASE / AOEprocess chamber. (Advacned Silcion Etch / Advanced Oxide Etch)
AK P/N J082016-5
 
200 mm STS / SPTS ESC Double sided ,3 lift pins on Ø 30 PCD
DPS II AXIOM LIFT BELLOWS
OEM STS / SPTS
OEM P/N 256332
APPLICABLE TOOL ASE / AOE Process Chamber (Advacned Silcion Etch / Advanced Oxide Etch)
AK P/N J082018-5
 
4" STS / SPTS TD ESC
ULTIMA LIFT BELLOWS
OEM STS / SPTS
OEM P/N N/A
APPLICABLE TOOL PEGASUS
 
6" STS / SPTS TD ESC
ULTIMA LIFT BELLOWS
OEM STS / SPTS
OEM P/N N/A
APPLICABLE TOOL PEGASUS
 
8" STS / SPTS TD ESC
ULTIMA LIFT BELLOWS
OEM STS / SPTS
OEM P/N N/A
APPLICABLE TOOL PEGASUS
 
100mm STS / SPTS / Alcatel ESC
ULTIMA LIFT BELLOWS
OEM STS / SPTS
OEM P/N CM04504A
APPLICABLE TOOL AMS200 / AMS3200 / AMS4200
AK P/N J082241-3
 
150mm STS / SPTS / Alcatel ESC
DPS II AXIOM LIFT BELLOWS
OEM SPTS / AMMS
OEM P/N CM03092
APPLICABLE TOOL 601E / AMS110
AK P/N J082119-6
 
150mm STS / SPTS / Alcatel ESC
ULTIMA LIFT BELLOWS
OEM SPTS / AMMS
OEM P/N CM04545
APPLICABLE TOOL AMS200 / AMS3200 / AMS4200
AK P/N J082223-3
 
150mm STS / SPTS / Alcatel ESC
DPS II AXIOM LIFT BELLOWS
OEM SPTS / AMMS
OEM P/N CM05724
APPLICABLE TOOL AMS200 / AMS3200 / AMS4200
AK P/N SJ082303-1
 
200mm STS / SPTS / Alcatel ESC
DPS II AXIOM LIFT BELLOWS
OEM SPTS / AMMS
OEM P/N CM04507A
APPLICABLE TOOL CM04507A
AK P/N J082242-3
 
200mm STS / SPTS / Alcatel ESC
ULTIMA LIFT BELLOWS
OEM SPTS / AMMS
OEM P/N CM05774
APPLICABLE TOOL AMS200 / AMS3200 / AMS4200
AK P/N SJ082310-1
 
Varian Viista 200mm ESC
DPS II AXIOM LIFT BELLOWS
OEM VARIAN
OEM P/N E11144750
APPLICABLE TOOL Viista Beam Line
AK P/N SJ082431
 
Varian Viista 200mm ESC
DPS II AXIOM LIFT BELLOWS
OEM VARIAN
OEM P/N E11135020
APPLICABLE TOOL Viista Beam Line
AK P/N SJ082401
 
Varian Viista 200mm ESC
DPS II AXIOM LIFT BELLOWS
OEM VARIAN
OEM P/N E11135000
APPLICABLE TOOL Viista Beam Line
AK P/N SJ082345
 
Varian Viista 300mm ESC
DPS II AXIOM LIFT BELLOWS
OEM VARIAN
OEM P/N E11144761
APPLICABLE TOOL Viista Beam Line
AK P/N SJ082332
 
Varian Viista 300mm ESC
DPS II AXIOM LIFT BELLOWS
OEM VARIAN
OEM P/N E11135010
APPLICABLE TOOL Viista Beam Line
AK P/N SJ082345
     
 
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