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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
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bullet ESC(Electrostatic Chuck)
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150mm STS / SPTS / Alcatel ESC
OEM SPTS / AMMS
OEM P/N CM05724
APPLICABLE TOOL AMS200 / AMS3200 / AMS4200
AK P/N SJ082303-1
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AK Tech 125-25, Saneop-ro 156beon-gil, Gosaek-dong, Gwonseon-gu, Suwon-si, Gyeonggi-do, Korea
Tel +82-31-210-4000 | Fax +82-31-211-0861 | E-mail aktech@aktech.kr
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