AK Tech Home  |  Sitemap  |  Korean
Company Products Facilities Quality Assurance Customer Center
 
  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
products
Bellows
Valve
Heater
Magnetic Seal
Assembly
ESC(Electrostatic Chuck)
LCD Valve
 
bullet ESC(Electrostatic Chuck)
HOME > products > ESC(Electrostatic Chuck)
 

100mm STS / SPTS / Alcatel ESC
OEM STS / SPTS
OEM P/N CM04504A
APPLICABLE TOOL AMS200 / AMS3200 / AMS4200
AK P/N J082241-3
Products Info

 

     
 
  Company Message from the CEO  |   General Information  |  History of AK Tech   |   Organization   |   Vision   |   Location
Products Bellows   |   Valve   |   Heater   |   Magnetic Seal   |   Assembly   |   ESC(Electrostatic Chuck)   |   LCD Valve   |  
Facilities Equipment  |   Factory
Quality Assurance Quality Assurance
Customer Center Notice   |   Contact Infomation   |   Download
 
 
AK Tech 125-25, Saneop-ro 156beon-gil, Gosaek-dong, Gwonseon-gu, Suwon-si, Gyeonggi-do, Korea
Tel +82-31-210-4000 | Fax +82-31-211-0861 | E-mail aktech@aktech.kr
Copyrights(c) 2011 AK Tech Co.,Ltd. All Rights Reserved.