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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
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100 mm STS / SPTS ESC Double sided ,3 lift pins on Ø 30 PCD
OEM STS / SPTS
OEM P/N 256326
APPLICABLE TOOL ASE / AOE Process Chamber (Advacned Silcion Etch / Advanced Oxide Etch)
AK P/N J082015-5
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AK Tech 125-25, Saneop-ro 156beon-gil, Gosaek-dong, Gwonseon-gu, Suwon-si, Gyeonggi-do, Korea
Tel +82-31-210-4000 | Fax +82-31-211-0861 | E-mail aktech@aktech.kr
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