AK Tech Home  |  Sitemap  |  Korean
Company Products Facilities Quality Assurance Customer Center
 
  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
products
Bellows
Valve
Heater
Magnetic Seal
Assembly
ESC(Electrostatic Chuck)
 
bullet Assembly
HOME > products > Assembly
 

Lift Assembly List
Products Info
No.
Description
공정
장비
OEM Code
1
AMAT Endura Lift Assembly
CVD
Endura
0010-13927
2
AMAT Endura Lift Assembly
CVD
Endura
0010-70271
3
AMAT 300mm Heater Lift Ass'y
CVD
Vector
0010-34644
4
AMAT 200mm Heater Lift Ass'y
CVD
Vector
0040-34219
5
ACTR Bellows SUS
CVD
LAM Flex
079-022847-003
6
Kiyo Ex Lift Cylinder
CVD
LAM Kiyo
790-073306-009
7
UMM Feedthru
CVD
AMAT Endura
0010-41242-02
8
UMM Rotary Joint
CVD
AMAT Endura
0190-33456
     
 
  Company Message from the CEO  |   General Information  |  History of AK Tech   |   Organization   |   Vision   |   Location
Products Bellows   |   Valve   |   Heater   |   Magnetic Seal   |   Assembly   |   ESC(Electrostatic Chuck)   |  
Facilities Equipment  |   Factory
Quality Assurance Quality Assurance
Customer Center Notice   |   Contact Infomation   |   Q & A   |   Download
 
 
AK Tech 125-25, Saneop-ro 156beon-gil, Gosaek-dong, Gwonseon-gu, Suwon-si, Gyeonggi-do, Korea
Tel +82-31-210-4000 | Fax +82-31-211-0861 | E-mail aktech@aktech.kr
Copyrights(c) 2011 AK Tech Co.,Ltd. All Rights Reserved.