|
No.
|
Description
|
공정
|
장비
|
OEM Code
|
|
300mm Spindle Index
|
|
1
|
300mm Spindle Index 270 C3 Vector
|
CVD
|
Vector
|
02-252432-00
|
|
2
|
300mm Spindle Index 270 C4 Vector
|
CVD
|
Vector
|
02-312735-00
|
|
3
|
300mm Spindle Index 270 C5 Vector
|
CVD
|
Vector
|
02-159137-00
|
|
4
|
300mm Spindle Index 270 C6 Vector
|
CVD
|
Vector
|
02-269293-00
|
|
5
|
300mm Spindle Index 270 C7 Vector
|
CVD
|
Vector
|
02-312753-00
|
|
6
|
300mm Spindle Index 270 C8 Vector
|
CVD
|
Vector
|
02-324753-00
|
|
300mm Servo Motor Spindle
|
|
1
|
300mm Servo Motor Spindle
|
CVD
|
Vector
|
02-317274-00
|
|
2
|
300mm Servo Motor Spindle
|
CVD
|
Vector
|
02-400831-00
|
|
3
|
300mm Servo Motor Spindle
|
CVD
|
Vector
|
02-381489-00
|
|
4
|
300mm Servo Motor Spindle
|
CVD
|
Vector
|
502-400832-00
|
|
5
|
300mm Servo Motor Spindle
|
CVD
|
Vector
|
02-397379-00
|
|
6
|
300mm Servo Motor Spindle
|
CVD
|
Vector
|
02-299691-00
|
|
7
|
300mm Servo Motor Spindle
|
CVD
|
Vector
|
02-252432-00
|
|
8
|
300mm Servo Motor Spindle
|
CVD
|
Vector
|
02-276537-00
|
|
9
|
300mm Servo Motor Spindle
|
CVD
|
Vector
|
02-367544-00
|
|
200mm Sequel Spindle
|
|
1
|
200mm Novellus Sequel Spindle Assy
|
CVD
|
Sequel
|
02-106507-00
|
