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Heater List
Products Info
No. Description 공정 장비 OEM Code
1 300mm 2-GAP Pedestal_R PVD INOVA 02-300478-00-R
2 Assy Heater Block(101) PVD ENDURA 0020-20125C
3 "Tin Heater Ass'y 6" 0010-21530
4 HTHU Heater Block 수리 PVD ENDURA 0010-76154
5 8" A101 Heater (Repair) PVD ENDURA 0010-21246
6 6" A101 Heater PVD ENDURA 0010-21530
7 8" STD Heater Repair (비어 있음)
8 Ass'y Heater Block(STD) 재생 0020-20125
9 ESC. Pedestal, DT ESC MT, ENDURA 2, 300mm PVD 0010-49546 REV.004
10 Heater Assy 8" B101 PVD ENDURA 0010-13626
     
 
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