Rendulum Gate Valve
** Application
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
** Features
- Compact
- Low vibration operation
- Easy and fast maintenance
- Pneumatic actuator
- Actuator Up/Down install possibility
** Options
- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
Products Info
SIZE : ISO-400, 500
Dimensions Approximate
**Specifications
Pressure range
1 X10-7mbar.l/s
Leak rate : body, seat
<1 X 10-9mbar.l/s
Differentialpressure on the gate
≤ 1.2 bar in either direction
Material
Valvebody, bonnet seal, blade
SS304, AL6061
Weldedbellows
SS304, AL6061
Valveactuator
SS304, AL6061
SealMaterials
VITON (option KALREZ,ETC)
Temperature
Valvebody
120°C
Valveactuator
80°C
Operation
Double acting
Cycleuntil first service
≥ 100.000
Positionsensor (open/close) - Reed switch
Micro switch (SMC: D-A93)