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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
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Butterfly Gate Valve

** Application

- Sputter Deposition
- Plasma Etch
- Other application that require pressure controller

** Features

- Pneumatic actuator
- Bypass pumping line
- Particle and vibration free
- Easy maintenance

** Options

- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
Products Info


SIZE : ISO-100
Dimensions Approximate


Pressure range 1 X10-6mbar.l/s
Leak rate : body, seat <1 X 10-8mbar.l/s
Differential pressure on the gate ≤ 1.2 bar in either direction
Material Valvebody, bonnet seal, blade AL6061
Welded bellows AL6061
Valve actuator
SS304, AL6061
Seal Materials VITON (option KALREZ,ETC)
Temperature Valve body 120°C
Valve actuator 80°C
Operation Double acting
Cycle until first service ≥ 300.000
Position sensor (open/close) - Reed switch Micro switch (SMC: D-A93)
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