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Valve
Butterfly Gate Valve
** Application
- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
** Features
- Pneumatic actuator
- Bypass pumping line
- Particle and vibration free
- Easy maintenance
** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
Products Info
SIZE : ISO-100
Dimensions Approximate
**Specifications
Pressure range
1 X10-6mbar.l/s
Leak rate : body, seat
<1 X 10-8mbar.l/s
Differential pressure on the gate
≤ 1.2 bar in either direction
Material
Valvebody, bonnet seal, blade
AL6061
Welded bellows
AL6061
Valve actuator
SS304, AL6061
Seal Materials
VITON (option KALREZ,ETC)
Temperature
Valve body
120°C
Valve actuator
80°C
Operation
Double acting
Cycle until first service
≥ 300.000
Position sensor (open/close) - Reed switch
Micro switch (SMC: D-A93)
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125-25, Saneop-ro 156beon-gil, Gosaek-dong, Gwonseon-gu, Suwon-si, Gyeonggi-do, Korea
Tel +82-31-210-4000 | Fax +82-31-211-0861 | E-mail aktech@aktech.kr
Copyrights
(c) 2011 AK Tech Co.,Ltd. All Rights Reserved.
