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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
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Heated Angle Valve_WITH CONTROLLER

** Application


- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System


** Features


- Extremely long life time
- Heating System
- Particle – Free
- Vibration _ Free
- Pneumatic Actuator
- Welded Bellows Seal
- Easy to service


** Options


- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Heating Temperature
- Bellows Material
Products Info

Valve_map13.gif

SIZE : ISO-25, 40, 50,63, 80, 100
Dimensions Approximate

**Specifications

Pressure range 5 X10-7mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.2 bar in either direction
Material Valvebody, bonnet seal, blade AL6061
Welded bellows SS316L (option Inconel)
Valve actuator
AL6061, SS304
Seal Materials CHEMRAZ(option Kalrez)
Temperature Valve body 150°C (option 180°C)
Valve actuator 100°C
Operation Single acting
Cycle until first service ≥ 1 million
Position sensor (open/close) - Reed switch SMC(D-A93)
     
 
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Tel +82-31-210-4000 | Fax +82-31-211-0861 | E-mail aktech@aktech.kr
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