Heated Angle Valve_WITH CONTROLLER
** Application
- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System
** Features
- Extremely long life time
- Heating System
- Particle – Free
- Vibration _ Free
- Pneumatic Actuator
- Welded Bellows Seal
- Easy to service
** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Heating Temperature
- Bellows Material
Products Info
SIZE : ISO-25, 40, 50,63, 80, 100
Dimensions Approximate
**Specifications
Pressure range
5 X10-7mbar.l/s
Leak rate : body, seat
<1 X 10-9mbar.l/s
Differential pressure on the gate
≤ 1.2 bar in either direction
Material
Valvebody, bonnet seal, blade
AL6061
Welded bellows
SS316L (option Inconel)
Valve actuator
AL6061, SS304
Seal Materials
CHEMRAZ(option Kalrez)
Temperature
Valve body
150°C (option 180°C)
Valve actuator
100°C
Operation
Single acting
Cycle until first service
≥ 1 million
Position sensor (open/close) - Reed switch
SMC(D-A93)