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Remote Plasma Control Valve
** Application
- High vacuum process
- All CVD process (including MO, PE,HDP, LP and AP)
- Photovoltaic and semiconductor application
** Features
- Pneumatic actuation
- Rated for 1 million cycles
- Double o-ring seal
- Easy maintenance
** Options
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
Products Info
SIZE : ISO-25, 40, 50
Dimensions Approximate
**Specifications
Pressure range
1 X10-8mbar.l/s
Leak rate : body, seat
<1 X 10-9mbar.l/s
Differential pressure on the gate
≤ 1.5 bar in either direction
Material
Valvebody, bonnet seal, blade
AL6061
Welded bellows
Valve actuator
AL6061
Seal Materials
CHEMRAZ
Temperature
Valve body
150°C
Valve actuator
100°C
Operation
Double acting
Cycle until first service
≥ 1 million
Position sensor (open/close) - Reed switch
Honeywell (11SM-244-T,JS-5)
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125-25, Saneop-ro 156beon-gil, Gosaek-dong, Gwonseon-gu, Suwon-si, Gyeonggi-do, Korea
Tel +82-31-210-4000 | Fax +82-31-211-0861 | E-mail aktech@aktech.kr
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(c) 2011 AK Tech Co.,Ltd. All Rights Reserved.
