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Remote Plasma Control Valve

** Application


- High vacuum process
- All CVD process (including MO, PE,HDP, LP and AP)
- Photovoltaic and semiconductor application


** Features


- Pneumatic actuation
- Rated for 1 million cycles
- Double o-ring seal
- Easy maintenance


** Options


- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
Products Info

Valve_map12.gif

SIZE : ISO-25, 40, 50
Dimensions Approximate

**Specifications

Pressure range 1 X10-8mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.5 bar in either direction
Material Valvebody, bonnet seal, blade AL6061
Welded bellows  
Valve actuator
AL6061
Seal Materials CHEMRAZ
Temperature Valve body 150°C
Valve actuator 100°C
Operation Double acting
Cycle until first service ≥ 1 million
Position sensor (open/close) - Reed switch Honeywell (11SM-244-T,JS-5)
     
 
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