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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
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Pneumatic Gate Valve

** Application


- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System


** Features


- Particle – Free
- Vibration – Free
- Pneumatic Actuator
- Position Indicator
- Fast valve welded bellows (AM350)
- Easy to service


** Options


- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Bellows Material (SS316L , Inconel )
Products Info

Valve_map10.gif

SIZE : ISO-40, 50, 63,80, 100, 125, 160, 200, 250, 320, 350,400, 450, 500
Dimensions Approximate


**Specifications


     
 
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