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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
Rectangular Gate Valve
Protection Gate Valve
Auto Gate Valve
Pneumatic Gate Valve
Manual Gate Valve
Remote Plasma Control Valve
HeatedAngle Valve
2Stage Angle Valve
Butterfly Gate Valve
Rendulum Gate Valve
Magnetic Seal
ESC(Electrostatic Chuck)
LCD Valve
bullet Valve
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** Application

- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System

** Features

- 2Step(soft & fast) pumping
- Particle – Free
- Vibration – Free
- Pneumatic Actuator
- Fast valve welded bellows (AM350)
- Easy to service

** Options

- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Bellows Material (SS316L , Inconel )
Products Info


SIZE : ISO-100, 125, 160,200, 250 Dimensions Approximate


Pressure range 5 X10-7mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.2 bar in either direction
Material Valvebody, bonnet seal, blade AL6061
Welded bellows SS316L (option Inconel)
Valve actuator
AL6061, SS304
Seal Materials VITON (option KALREZ)
Temperature Valve body 120°C (option 180°C)
Valve actuator 80°C
Operation Single acting
Cycle until first service ≥ 50,000
Position sensor (open/close) - Reed switch SMC(D-A93)
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