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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
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Auto Gate Valve-WITH CONTROLLER

** Application


- Etcher
- CVD(Mo, LP, HDP, PE)
- Sputter
- R.T.P
- LCD, PDP Systems
- Other Vacuum System


** Features


- 2Step(soft & fast) pumping
- Particle – Free
- Vibration – Free
- Pneumatic Actuator
- Fast valve welded bellows (AM350)
- Easy to service


** Options


- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Bellows Material (SS316L , Inconel )
Products Info

Valve_map09.gif

SIZE : ISO-100, 125, 160,200, 250 Dimensions Approximate


**Specifications

Pressure range 5 X10-7mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.2 bar in either direction
Material Valvebody, bonnet seal, blade AL6061
Welded bellows SS316L (option Inconel)
Valve actuator
AL6061, SS304
Seal Materials VITON (option KALREZ)
Temperature Valve body 120°C (option 180°C)
Valve actuator 80°C
Operation Single acting
Cycle until first service ≥ 50,000
Position sensor (open/close) - Reed switch SMC(D-A93)
     
 
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