- Sputter Deposition
- Plasma Etch
- CVD
- Other application that require pressure controller
** Features
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Double pneumatic actuator
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
** Options
- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
125-25, Saneop-ro 156beon-gil, Gosaek-dong, Gwonseon-gu, Suwon-si, Gyeonggi-do, Korea
Tel +82-31-210-4000 | Fax +82-31-211-0861 | E-mail aktech@aktech.kr Copyrights(c) 2011 AK Tech Co.,Ltd. All Rights Reserved.
