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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
Rectangular Gate Valve
Protection Gate Valve
Auto Gate Valve
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HeatedAngle Valve
2Stage Angle Valve
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Rectangular Gate Valve_SOLAR, LCD, FPD

** Application

- Sputter Deposition
- Plasma Etch
- Other application that require pressure controller

** Features

- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Double pneumatic actuator
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly

** Options

- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
Products Info


SIZE : 32X222 , 46X236, 50X336, ETC Dimensions Approximate


Pressure range 1 X10-9mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.2 bar in either direction
Material Valvebody, bonnet seal, blade AL6061
Welded bellows AL6061
Valve actuator
SS304, AL6061
Seal Materials VITON (option KALREZ,ETC)
Temperature Valve body 120°C
Valve actuator 80°C
Operation Double acting
Cycle until first service ≥ 1 million
Position sensor (open/close) - Reed switch FESTO : SME-8M-DS-24V-K-2.5-OE
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