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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
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Rectangular Gate Valve_DOOR STANDARD

** Application


- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/flat panel processing
- All other cluster vacuum systems


** Features


- Semi standard application (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
- Particle and vibration free
- Realization of exact L-motion
- Easy maintenance


** Options


- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Double gate seal door valve available
Products Info

Valve_map07.gif

SIZE : 32X222 , 46X236, 50X336, ETC Dimensions Approximate


**Specifications

Pressure range 1 X10-9mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.0 bar in either direction
Material Valvebody, bonnet seal, blade AL6061
Welded bellows  
Valve actuator
SS304, AL6061
Seal Materials VITON (option KALREZ,CHEMRAZ)
Temperature Valve body 100°C
Valve actuator 60°C
Operation Double acting
Cycle until first service ≥ 3 million
Position sensor (open/close) - Reed switch 3MC(D-A93)
     
 
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