Metal bellows, Gate Valve, Metal Heater, Magnetic Seal, RPS, Rectangular Gate Valve

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Rectangular Gate Valve_DOOR STANDARD

** Application

- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/flat panel processing
- All other cluster vacuum systems

** Features

- Semi standard application (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
- Particle and vibration free
- Realization of exact L-motion
- Easy maintenance

** Options

- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
- Double gate seal door valve available

Products Info

SIZE : 32X222 , 46X236, 50X336, ETC

Dimensions Approximate

**Specifications

Pressure range		1 X10-9mbar.l/s
Leak rate : body, seat		<1 X 10-9mbar.l/s
Differential pressure on the gate		≤ 1.0 bar in either direction
Material	Valvebody, bonnet seal, blade	AL6061
	Welded bellows
	Valve actuator	SS304, AL6061
Seal Materials		VITON (option KALREZ,CHEMRAZ)
Temperature	Valve body	100°C
Temperature	Valve actuator	60°C
Operation		Double acting
Cycle until first service		≥ 3 million
Position sensor (open/close) - Reed switch		3MC(D-A93)

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