- Where heating is required, heated housing and blade heating is optional
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- All other cluster vacuum systems
** Features
- Heated gate (or heated gate and housing) to reduce particulate buildup
- Semi standard application (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
** Options
- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
125-25, Saneop-ro 156beon-gil, Gosaek-dong, Gwonseon-gu, Suwon-si, Gyeonggi-do, Korea
Tel +82-31-210-4000 | Fax +82-31-211-0861 | E-mail aktech@aktech.kr Copyrights(c) 2011 AK Tech Co.,Ltd. All Rights Reserved.
