AK Tech Home  |  Sitemap  |  Korean
Company Products Facilities Quality Assurance Customer Center
 
  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
 
products
Bellows
Valve
Rectangular Gate Valve
Protection Gate Valve
Auto Gate Valve
Pneumatic Gate Valve
Manual Gate Valve
Remote Plasma Control Valve
HeatedAngle Valve
2Stage Angle Valve
Butterfly Gate Valve
Rendulum Gate Valve
Heater
Magnetic Seal
Assembly
ESC(Electrostatic Chuck)
 
bullet Valve
HOME > products > Valve
 

Rectangular Gate Valve_HEATED TYPE

** Application


- Where heating is required, heated housing and blade heating is optional
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- All other cluster vacuum systems


** Features


- Heated gate (or heated gate and housing) to reduce particulate buildup
- Semi standard application (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly


** Options


- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
Products Info

Valve_map05.gif

SIZE : 32X222 , 46X236, 50X336, ETC Dimensions Approximate


**Specifications

Pressure range 1 X10-9mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.2 bar in either direction
Material Valvebody, bonnet seal, blade AL6061
Welded bellows AM350
Valve actuator
SS304, AL6061
Seal Materials KALREZ
Temperature Valve body 180°C
Valve actuator 100°C
Operation Double acting
Cycle until first service ≥ 1 million
Position sensor (open/close) - Reed switch Honeywell (11SM-244-T,JS-5)
     
 
  Company Message from the CEO  |   General Information  |  History of AK Tech   |   Organization   |   Vision   |   Location
Products Bellows   |   Valve   |   Heater   |   Magnetic Seal   |   Assembly   |   ESC(Electrostatic Chuck)   |  
Facilities Equipment  |   Factory
Quality Assurance Quality Assurance
Customer Center Notice   |   Contact Infomation   |   Q & A   |   Download
 
 
AK Tech 125-25, Saneop-ro 156beon-gil, Gosaek-dong, Gwonseon-gu, Suwon-si, Gyeonggi-do, Korea
Tel +82-31-210-4000 | Fax +82-31-211-0861 | E-mail aktech@aktech.kr
Copyrights(c) 2011 AK Tech Co.,Ltd. All Rights Reserved.