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  AK Tech Vacuum Valve, Sub Assembly and vacuum sealing solution for Semiconductor fab  
Rectangular Gate Valve
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Rectangular Gate Valve_HEATED TYPE

** Application

- Where heating is required, heated housing and blade heating is optional
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- All other cluster vacuum systems

** Features

- Heated gate (or heated gate and housing) to reduce particulate buildup
- Semi standard application (Semi E21-94, Semi E24-92, Semi- E21.1-1296)
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly

** Options

- Custom sizes available
- Various o-ring compounds (Kalrez®,Chemraz®, etc.)
Products Info


SIZE : 32X222 , 46X236, 50X336, ETC Dimensions Approximate


Pressure range 1 X10-9mbar.l/s
Leak rate : body, seat <1 X 10-9mbar.l/s
Differential pressure on the gate ≤ 1.2 bar in either direction
Material Valvebody, bonnet seal, blade AL6061
Welded bellows AM350
Valve actuator
SS304, AL6061
Seal Materials KALREZ
Temperature Valve body 180°C
Valve actuator 100°C
Operation Double acting
Cycle until first service ≥ 1 million
Position sensor (open/close) - Reed switch Honeywell (11SM-244-T,JS-5)
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